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Onto Innovation Inc.


ONTO: Onto Innovation Inc is engaged in the design, development, manufacture, and support of high-performance control metrology, defect inspection, lithography, and data analysis systems used by microelectronics device manufacturers. The Company and its subsidiaries currently operate in a single operating segment. The company mainly operates in the United States, Asia, and Europe, with China and South Korea the largest sources of total revenue.


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Government lobbying spending instances

  • $30,000 Aug 02, 2023 Issue: Science/Technology Trade (domestic/foreign)
  • $30,000 Apr 20, 2023 Issue: Science/Technology Trade (domestic/foreign)
  • $30,000 Feb 06, 2023 Issue: Science/Technology Trade (domestic/foreign)
  • $30,000 Nov 11, 2022 Issue: Science/Technology Trade (domestic/foreign)
  • $30,000 Aug 09, 2022 Issue: Science/Technology Trade (domestic/foreign)
  • $30,000 Apr 26, 2022 Issue: Science/Technology Trade (domestic/foreign)
  • $40,000 Jan 20, 2022 Issue: Science/Technology Trade (domestic/foreign)
  • $30,000 Nov 04, 2021 Issue: Trade (domestic/foreign) Science/Technology
  • $20,000 Jul 21, 2021 Issue: Trade (domestic/foreign) Science/Technology
U.S. Patents

New patents grants

  • Patent Title: System and method for correcting overlay errors in a lithographic process Jun. 27, 2023
  • Patent Title: Opto-acoustic measurement of a transparent film stack Jun. 06, 2023
  • Patent Title: Wafer inspection system including a laser triangulation sensor Feb. 14, 2023
  • Patent Title: System and method for optimizing a lithography exposure process Dec. 20, 2022
  • Patent Title: Beamsplitter based ellipsometer focusing system Jul. 12, 2022
  • Patent Title: Conformal stage Jun. 07, 2022
  • Patent Title: Interferometry with pixelated color discriminating elements combined with pixelated polarization masks Jun. 07, 2022
  • Patent Title: Focus system for oblique optical metrology device May. 31, 2022
  • Patent Title: Fast generalized multi-wavelength ellipsometer May. 31, 2022
  • Patent Title: Vortex polarimeter May. 31, 2022
  • Patent Title: Wafer singulation process control Apr. 26, 2022
  • Patent Title: Active damper for semiconductor metrology and inspection systems Mar. 22, 2022
  • Patent Title: On-axis dynamic interferometer and optical imaging systems employing the same Mar. 01, 2022
  • Patent Title: Optical metrology device using numerical aperture reduction Nov. 02, 2021
  • Patent Title: Sample surface polarization modification in interferometric defect inspection Oct. 19, 2021
  • Patent Title: System and method for optimizing a lithography exposure process Sep. 21, 2021
  • Patent Title: Calibration of azimuth angle for optical metrology stage using grating-coupled surface plasmon resonance Aug. 03, 2021
  • Patent Title: Sample inspection using topography Mar. 02, 2021
  • Patent Title: Sub-resolution defect detection Mar. 02, 2021
  • Patent Title: Non-adhesive mounting assembly for a tall rochon polarizer Feb. 09, 2021
  • Patent Title: Optical metrology system using infrared wavelengths Jan. 26, 2021
  • Patent Title: Interferometer with pixelated phase shift mask Nov. 10, 2020
  • Patent Title: Foup purge shield Sep. 22, 2020
  • Patent Title: Light source failure identification in an optical metrology device Sep. 15, 2020
  • Patent Title: Optical metrology device for measuring samples having thin or thick films Aug. 18, 2020
  • Patent Title: Surface height determination of transparent film Feb. 11, 2020
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