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MKS Instruments Inc

MKSI

MKSI: MKS Instruments Inc is engaged in providing instruments, subsystems, and process control systems used to measure, monitor, deliver, and control parameters of manufacturing processes. The company's product portfolio includes instruments, components, and systems required in manufacturing products such as flat panel displays, medical devices, and electronic materials, among others used in industrial technologies, semiconductor, life and health sciences, and research and defense markets. The company organizes itself into three reportable business segments: Vacuum Solutions, Photonics Solutions, and Materials Solutions. The Vacuum Solutions segment contributes to roughly half of the company's revenue, and the majority of its revenue is earned in the United States.

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Government lobbying spending instances

  • $15,000 Jul 13, 2018 Issue: Homeland Security Defense
  • $15,000 Apr 19, 2018 Issue: Homeland Security Defense
  • $15,000 Jan 05, 2018 Issue: Homeland Security Defense
  • $5,000 Oct 18, 2017 Issue: Defense Homeland Security
  • $10,000 Apr 11, 2017 Issue: Defense Homeland Security
  • $10,000 Jan 12, 2017 Issue: Homeland Security Defense
  • $10,000 Oct 19, 2016 Issue: Defense Homeland Security
  • $12,000 Oct 11, 2012 Issue: Budget/Appropriations
  • $18,000 Jul 05, 2012 Issue: Budget/Appropriations
  • $18,000 Apr 02, 2012 Issue: Budget/Appropriations
  • $18,000 Jan 19, 2012 Issue: Energy/Nuclear
  • $18,000 Oct 03, 2011 Issue: Energy/Nuclear
  • $18,000 Jul 15, 2011 Issue: Science/Technology
  • $18,000 Apr 14, 2011 Issue: Budget/Appropriations
  • $6,000 Jan 10, 2011 Issue: None
U.S. Patents

New patents grants

  • Patent Title: Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use Aug. 22, 2023
  • Patent Title: System and method of power generation with phase linked solid-state generator modules Aug. 08, 2023
  • Patent Title: Adaptive pulse shaping with post match sensor Aug. 01, 2023
  • Patent Title: Systems and methods for generating a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content Jul. 04, 2023
  • Patent Title: Method and apparatus for plasma generation May. 30, 2023
  • Patent Title: Thermal conductivity gauge May. 23, 2023
  • Patent Title: Pressure control using an external trigger Feb. 07, 2023
  • Patent Title: Switched capacitor modulator Jan. 03, 2023
  • Patent Title: System and method for arc detection using a bias rf generator signal Dec. 27, 2022
  • Patent Title: Adaptive control for a power generator Dec. 20, 2022
  • Patent Title: Cooling and compression clamp for short lead power devices Dec. 20, 2022
  • Patent Title: Apparatus and tuning method for mitigating rf load impedance variations due to periodic disturbances Dec. 13, 2022
  • Patent Title: Ozonated water delivery system and method of use Dec. 06, 2022
  • Patent Title: Method and apparatus for pulse gas delivery with concentration measurement Nov. 29, 2022
  • Patent Title: Method and apparatus for pulse gas delivery using an external pressure trigger Nov. 29, 2022
  • Patent Title: Predictive diagnostics systems and methods using vacuum pressure control valves Oct. 25, 2022
  • Patent Title: System and method of power generation with phase linked solid-state generator modules Oct. 18, 2022
  • Patent Title: Method and apparatus for pulse gas delivery Aug. 02, 2022
  • Patent Title: Adaptive periodic waveform controller Jun. 21, 2022
  • Patent Title: Method and apparatus for deposition cleaning in a pumping line Jun. 21, 2022
  • Patent Title: Polymer composite vacuum components Jun. 21, 2022
  • Patent Title: Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in rf powered plasma applications Apr. 26, 2022
  • Patent Title: Capacitance manometer with improved baffle for improved detection accuracy Mar. 29, 2022
  • Patent Title: Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use Mar. 01, 2022
  • Patent Title: Microwave magnetron with constant anodic impedance and systems using the same Feb. 22, 2022
  • Patent Title: Intermodulation distortion mitigation using electronic variable capacitor Jan. 25, 2022
  • Patent Title: Microwave applicator with solid-state generator power source Jan. 11, 2022
  • Patent Title: Methods and apparatus for pressure based mass flow ratio control Nov. 30, 2021
  • Patent Title: Low repetition rate infrared tunable femtosecond laser source Nov. 02, 2021
  • Patent Title: High speed synchronization of plasma source/bias power delivery Oct. 26, 2021
  • Patent Title: Radical output monitor for a remote plasma source and method of use Sep. 07, 2021
  • Patent Title: Cooling and compression clamp for short lead power devices Jul. 27, 2021
  • Patent Title: Actively cooled vacuum isolation valve Jul. 06, 2021
  • Patent Title: Adaptive control for a power generator Jun. 22, 2021
  • Patent Title: Method and apparatus for deposition cleaning in a pumping line Jun. 01, 2021
  • Patent Title: Plasma source having a dielectric plasma chamber with improved plasma resistance May. 25, 2021
  • Patent Title: Piecewise rf power systems and methods for supplying pre-distorted rf bias voltage signals to an electrode in a processing chamber May. 18, 2021
  • Patent Title: Adaptive control for a power generator May. 18, 2021
  • Patent Title: Multi-junction detector device and method of manufacture May. 04, 2021
  • Patent Title: Anode electrode shield for inverted magnetron cold cathode ionization gauge Apr. 06, 2021
  • Patent Title: System for and method of fast pulse gas delivery Apr. 06, 2021
  • Patent Title: Gas analyzer system with ion source Mar. 16, 2021
  • Patent Title: Method and apparatus for processing dielectric materials using microwave energy Mar. 09, 2021
  • Patent Title: Toroidal plasma channel with varying cross-section areas along the channel Feb. 23, 2021
  • Patent Title: Pulsed, bidirectional radio frequency source/load Feb. 23, 2021
  • Patent Title: Gas analysis with an inverted magnetron source Feb. 23, 2021
  • Patent Title: Method and apparatus for partial pressure detection Feb. 09, 2021
  • Patent Title: Impedance matching network model based correction scheme and performance repeatability Feb. 02, 2021
  • Patent Title: Apparatus and method for ignition of a plasma system and for monitoring health of the plasma system Feb. 02, 2021
  • Patent Title: Robust ion source Jan. 12, 2021
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